1. Micro-Epsilon
  2. 変位・距離・位置センサ
  3. 静電容量センサ
  4. センサ一覧

静電容量変位センサのモデル一覧

capaNCDT

マイクロエプシロン社の静電容量変位センサは、様々なフォームファクタや仕様でお求めいただけます。測定範囲やフォームファクタ、製造技術の異なるモデルがあり、静電容量変位センサは円筒形状（内蔵ケーブルあるいはソケット）またはフラットタイプ（内蔵ケーブル）からお選びいただけます。変位センサは再校正なしで交換できるので、短時間でセンサの交換を行うことができます。また、大半のセンサがクリーンルームや超高真空内で使用可能です。

マイクロエプシロン社製静電容量センサの詳細情報については、各項目をクリックしてご覧ください。

ソケットの備わったボルト型センサー

Model Measuring range Min. ø Target Dimension
CSE05/M8 0,5 mm Ø6 mm Ø8 x 17 mm
CSE1,25/M12 1,25 mm Ø10 mm Ø12 x 22 mm
CSE2/M16 2 mm Ø14 mm Ø16 x 22mm
CSE3/M24 3 mm Ø20 mm Ø24 x 30 mm
CS = capa Sensor
E = extended measuring range

Detail

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CSE05/M8

CAD Ansicht
Weight: 3,5 g
分解能: 0,375 nm *
直線性: ≤ ±0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE1,25/M12

CAD Ansicht
Weight: 11,5 g
分解能: 0,95 nm *
直線性: ≤ ±1,25 µm *
Temperature stability sensitivity: -50 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE2/M16

CAD Ansicht
Weight: 35 g
分解能: 1,5 nm *
直線性: ≤ ±2 µm *
Temperature stability sensitivity: -80 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE3/M24

CAD Ansicht
Weight: 80 g
分解能: 2,25 nm *
直線性: ≤ ±3 µm *
Temperature stability sensitivity: -85 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

円筒形状センサ（ソケットタイプ）

Model Measuring range Min. ø Target Dimension
CS005 0,05 mm 3 mm Ø6 × 12 mm
CS02 0,2 mm 5 mm Ø6 × 12 mm
CS05 0,5 mm 7 mm Ø8 × 12 mm
CSE05 0,5 mm 6 mm Ø6 × 12 mm
CS08 0,8 mm 9 mm Ø10 × 15 mm
CS1 1 mm 9 mm Ø10 × 21 mm
CS1HP 1 mm 9 mm Ø10 × 20 mm
CSE1 1 mm 8 mm Ø8 × 12 mm
CS2 2 mm 17 mm Ø20 × 24 mm
CSE2 2 mm 14 mm Ø14 × 22 mm
CS3 3 mm 27 mm Ø30 × 24 mm
CS5 5 mm 37 mm Ø40 × 24 mm
CS10 10 mm 57 mm Ø60 × 24 mm
CS = capa Sensor
HP = High Precision

Detail

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CS005

CAD Ansicht
Weight: 2 g
分解能: 0,0375 nm *
直線性: 0,15 µm *
Temperature stability sensitivity: -0,5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS02

CAD Ansicht
Weight: 2 g
分解能: 0,15 nm *
直線性: 0,04 µm *
Temperature stability sensitivity: -2 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS05

CAD Ansicht
Weight: 4 g
分解能: 0,375 nm *
直線性: 0,5 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE05

CAD Ansicht
Weight: 2 g
分解能: 0,375 nm *
直線性: 0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS08

CAD Ansicht
Weight: 7 g
分解能: 0,6 nm *
直線性: 0,4 µm *
Temperature stability sensitivity: -8 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1

CAD Ansicht
Weight: 8 g
分解能: 0,75 nm *
直線性: 1,5 µm *
Temperature stability sensitivity: -32 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1HP

CAD Ansicht
Weight: 8 g
分解能: 0,75 nm *
直線性: 1,5 µm *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE1

CAD Ansicht
Weight: 3,5 g
分解能: 0,75 nm *
直線性: 2 µm *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS2

CAD Ansicht
Weight: 50 g
分解能: 1,5 nm *
直線性: 1 µm *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE2

CAD Ansicht
Weight: 20 g
分解能: 1,5 nm *
直線性: 2,6 µm *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS3

CAD Ansicht
Weight: 70 g
分解能: 2,25 nm *
直線性: 0,9 µm *
Temperature stability sensitivity: -96 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS5

CAD Ansicht
Weight: 95 g
分解能: 3,75 nm *
直線性: 2,5 µm *
Temperature stability sensitivity: -160 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS10

CAD Ansicht
Weight: 180 g
分解能: 7,5 nm *
直線性: 15 µm *
Temperature stability sensitivity: -320 nm/ppm/°C
Operating temperature max.: +200 °C
* depends on controller unit

円筒形状センサ（内蔵ケーブルタイプ）

Model Measuring range Min. ø Target Dimension
CSH02-CAm1,4 0,2 mm 7 mm Ø8 × 14 mm
CSH05-CAm1,4 0,5 mm 7 mm Ø8 × 14 mm
CSH1-CAm1,4 1 mm 11 mm Ø12 × 14 mm
CSH1,2-CAm1,4 1,2 mm 11 mm Ø12 × 14 mm
CSH2-CAm1,4 2 mm 17 mm Ø20 × 14 mm
CSH = capa Sensor Hybrid

Detail

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CSH02-CAm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,15 nm *
直線性: 0,054 µm *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05-CAm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,38 nm *
直線性: 0,13 µm *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1-CAm1,4

CAD Ansicht
Weight: 33 g
分解能: 0,75 nm *
直線性: 0,13 µm *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2-CAm1,4

CAD Ansicht
Weight: 33 g
分解能: 0,9 nm *
直線性: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2-CAm1,4

CAD Ansicht
Weight: 38 g
分解能: 1,5 nm *
直線性: 0,5 µm *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

フラット形状センサ（内蔵ケーブル付き）

Model Measuring range Min. ø Target Dimension
CSH02FL-CRm1,4 0,2 mm 7 mm 10,5 × 8 × 4 mm
CSH05FL-CRm1,4 0,5 mm 7 mm 10,5 × 8 × 4 mm
CSH1FL-CRm1,4 1 mm 11 mm 17 × 12 × 4 mm
CSH1,2FL-CRm1,4 1,2 mm 11 mm 17 × 12 × 4 mm
CSH2FL-CRm1,4 2 mm 17 mm 20 × 20 × 5 mm
CSH = capa Sensor Hybrid
FL = Flat Design

Detail

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CSH02FL-CRm1,4

CAD Ansicht
Weight: 28 g
分解能: 0,15 nm *
直線性: 0,05 µm *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05FL-CRm1,4

CAD Ansicht
Weight: 28 g
分解能: 0,38 nm *
直線性: 0,09 µm *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1FL-CRm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,75 nm *
直線性: 0,2 µm *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2FL-CRm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,9 nm *
直線性: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2FL-CRm1,4

CAD Ansicht
Weight: 36 g
分解能: 1,5 nm *
直線性: 0,32 µm *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

静電容量式ギャップセンサ

Model Measuring range Min. ø Target Dimension
CSG0,50-CAm2,0 0,9 - 1,9 7x8 mm 200x15x0,9
CSG1,0-CAm2,0 0,9 - 2,9 mm 8x9 mm 200x15x0,9
CSG = capa Sensor Gap

Detail

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CSG0,50-CAm2,0

CAD Ansicht
Weight: 77 g
分解能: 4 nm *
直線性: 0,5 µm *
* depends on controller unit

CSG1,0-CAm2,0

CAD Ansicht
Weight: 77 g
分解能: 8 nm *
直線性: 1 µm *
* depends on controller unit
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静電容量センサ
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SENTEC Co. Ltd

+81 6 6304 8858

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Sankyo International Corp.

+81 3 3662 8100

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Sankyo International Corp.
No. 9-14, Nihonbashi-Yokoyamacho,
Chuo-Ku, Tokyo 103-0003 Japan
sales@sankyointernational.co.jp
+81 3 3662 8100
+81 3 3662 8050