静電容量変位センサのモデル一覧

capaNCDT

マイクロエプシロン社の静電容量変位センサは、様々なフォームファクタや仕様でお求めいただけます。測定範囲やフォームファクタ、製造技術の異なるモデルがあり、静電容量変位センサは円筒形状(内蔵ケーブルあるいはソケット)またはフラットタイプ(内蔵ケーブル)からお選びいただけます。変位センサは再校正なしで交換できるので、短時間でセンサの交換を行うことができます。また、大半のセンサがクリーンルームや超高真空内で使用可能です。

マイクロエプシロン社製静電容量センサの詳細情報については、各項目をクリックしてご覧ください。

CS = capa Sensor
E = extended measuring range

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSE05/M8

CAD Ansicht
Weight: 3,5 g
分解能: 0,375 nm *
直線性: ≤ ±0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE1,25/M12

CAD Ansicht
Weight: 11,5 g
分解能: 0,95 nm *
直線性: ≤ ±1,25 µm *
Temperature stability sensitivity: -50 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE2/M16

CAD Ansicht
Weight: 35 g
分解能: 1,5 nm *
直線性: ≤ ±2 µm *
Temperature stability sensitivity: -80 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE3/M24

CAD Ansicht
Weight: 80 g
分解能: 2,25 nm *
直線性: ≤ ±3 µm *
Temperature stability sensitivity: -85 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit
CS = capa Sensor
HP = High Precision

Detail

info-40px Please move your mouse over the table to show more detailed information.

CS005

CAD Ansicht
Weight: 2 g
分解能: 0,0375 nm *
直線性: 0,15 µm *
Temperature stability sensitivity: -0,5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS02

CAD Ansicht
Weight: 2 g
分解能: 0,15 nm *
直線性: 0,04 µm *
Temperature stability sensitivity: -2 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS05

CAD Ansicht
Weight: 4 g
分解能: 0,375 nm *
直線性: 0,5 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE05

CAD Ansicht
Weight: 2 g
分解能: 0,375 nm *
直線性: 0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS08

CAD Ansicht
Weight: 7 g
分解能: 0,6 nm *
直線性: 0,4 µm *
Temperature stability sensitivity: -8 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1

CAD Ansicht
Weight: 8 g
分解能: 0,75 nm *
直線性: 1,5 µm *
Temperature stability sensitivity: -32 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1HP

CAD Ansicht
Weight: 8 g
分解能: 0,75 nm *
直線性: 1,5 µm *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE1

CAD Ansicht
Weight: 3,5 g
分解能: 0,75 nm *
直線性: 2 µm *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS2

CAD Ansicht
Weight: 50 g
分解能: 1,5 nm *
直線性: 1 µm *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE2

CAD Ansicht
Weight: 20 g
分解能: 1,5 nm *
直線性: 2,6 µm *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS3

CAD Ansicht
Weight: 70 g
分解能: 2,25 nm *
直線性: 0,9 µm *
Temperature stability sensitivity: -96 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS5

CAD Ansicht
Weight: 95 g
分解能: 3,75 nm *
直線性: 2,5 µm *
Temperature stability sensitivity: -160 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS10

CAD Ansicht
Weight: 180 g
分解能: 7,5 nm *
直線性: 15 µm *
Temperature stability sensitivity: -320 nm/ppm/°C
Operating temperature max.: +200 °C
* depends on controller unit
CSH = capa Sensor Hybrid

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSH02-CAm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,15 nm *
直線性: 0,054 µm *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05-CAm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,38 nm *
直線性: 0,13 µm *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1-CAm1,4

CAD Ansicht
Weight: 33 g
分解能: 0,75 nm *
直線性: 0,13 µm *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2-CAm1,4

CAD Ansicht
Weight: 33 g
分解能: 0,9 nm *
直線性: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2-CAm1,4

CAD Ansicht
Weight: 38 g
分解能: 1,5 nm *
直線性: 0,5 µm *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
CSH = capa Sensor Hybrid
FL = Flat Design

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSH02FL-CRm1,4

CAD Ansicht
Weight: 28 g
分解能: 0,15 nm *
直線性: 0,05 µm *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05FL-CRm1,4

CAD Ansicht
Weight: 28 g
分解能: 0,38 nm *
直線性: 0,09 µm *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1FL-CRm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,75 nm *
直線性: 0,2 µm *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2FL-CRm1,4

CAD Ansicht
Weight: 30 g
分解能: 0,9 nm *
直線性: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2FL-CRm1,4

CAD Ansicht
Weight: 36 g
分解能: 1,5 nm *
直線性: 0,32 µm *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
CSG = capa Sensor Gap

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSG0,50-CAm2,0

CAD Ansicht
Weight: 77 g
分解能: 4 nm *
直線性: 0,5 µm *
* depends on controller unit

CSG1,0-CAm2,0

CAD Ansicht
Weight: 77 g
分解能: 8 nm *
直線性: 1 µm *
* depends on controller unit
お問い合わせ
SENTEC Co. Ltd

+81 6 6304 8858

お問い合わせ

Sankyo International Corp.

+81 3 3662 8100

お問い合わせ

{{$select.selected.name}}
Your central contact

{{c.name}}

{{c.name}}

{{c.company}}

{{c.name}}

{{c.fon}}

お問い合わせ

{{c.name}}

{{c.company}}

{{c.fon}}

お問い合わせ

{{c.name}}

{{c.company}}

{{c.fon}}

お問い合わせ

Your regional contact

{{c.name}}

{{c.name}}

{{c.fon}}

お問い合わせ

Sankyo International Corp.
No. 9-14, Nihonbashi-Yokoyamacho,
Chuo-Ku, Tokyo 103-0003 Japan
sales@sankyointernational.co.jp
+81 3 3662 8100
+81 3 3662 8050