静電容量変位センサのモデル一覧

capaNCDT

Cylindric, capacitive displacement sensors

capaNCDT

Cylindric, capacitive displacement sensors with integrated cable

capaNCDT

Capacitive flat sensors

capaNCDT

Capacitive gap sensors

マイクロエプシロン社の静電容量変位センサは、様々なフォームファクタや仕様でお求めいただけます。測定範囲やフォームファクタ、製造技術の異なるモデルがあり、静電容量変位センサは円筒形状（内蔵ケーブルあるいはソケット）またはフラットタイプ（内蔵ケーブル）からお選びいただけます。変位センサは再校正なしで交換できるので、短時間でセンサの交換を行うことができます。また、大半のセンサがクリーンルームや超高真空内で使用可能です。

マイクロエプシロン社製静電容量センサの詳細情報については、各項目をクリックしてご覧ください。

ソケットの備わったボルト型センサー

Model	Measuring range	Min. ø Target	Dimension
CSE05/M8	0,5 mm	Ø6 mm	Ø8 x 17 mm
CSE1,25/M12	1,25 mm	Ø10 mm	Ø12 x 22 mm
CSE2/M16	2 mm	Ø14 mm	Ø16 x 22mm
CSE3/M24	3 mm	Ø20 mm	Ø24 x 30 mm

CS = capa Sensor
E = extended measuring range

Detail

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CSE05/M8

Weight:	3,5 g
分解能:	0,375 nm *
直線性:	≤ ±0,15 µm *
Temperature stability sensitivity:	-5 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE1,25/M12

Weight:	11,5 g
分解能:	0,95 nm *
直線性:	≤ ±1,25 µm *
Temperature stability sensitivity:	-50 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE2/M16

Weight:	35 g
分解能:	1,5 nm *
直線性:	≤ ±2 µm *
Temperature stability sensitivity:	-80 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE3/M24

Weight:	80 g
分解能:	2,25 nm *
直線性:	≤ ±3 µm *
Temperature stability sensitivity:	-85 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

円筒形状センサ（ソケットタイプ）

Model	Measuring range	Min. ø Target	Dimension
CS005	0,05 mm	3 mm	Ø6 × 12 mm
CS02	0,2 mm	5 mm	Ø6 × 12 mm
CS05	0,5 mm	7 mm	Ø8 × 12 mm
CSE05	0,5 mm	6 mm	Ø6 × 12 mm
CS08	0,8 mm	9 mm	Ø10 × 15 mm
CS1	1 mm	9 mm	Ø10 × 21 mm
CS1HP	1 mm	9 mm	Ø10 × 20 mm
CSE1	1 mm	8 mm	Ø8 × 12 mm
CS2	2 mm	17 mm	Ø20 × 24 mm
CSE2	2 mm	14 mm	Ø14 × 22 mm
CS3	3 mm	27 mm	Ø30 × 24 mm
CS5	5 mm	37 mm	Ø40 × 24 mm
CS10	10 mm	57 mm	Ø60 × 24 mm

CS = capa Sensor
HP = High Precision

Detail

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CS005

Weight:	2 g
分解能:	0,0375 nm *
直線性:	0,15 µm *
Temperature stability sensitivity:	-0,5 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS02

Weight:	2 g
分解能:	0,15 nm *
直線性:	0,04 µm *
Temperature stability sensitivity:	-2 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS05

Weight:	4 g
分解能:	0,375 nm *
直線性:	0,5 µm *
Temperature stability sensitivity:	-5 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE05

Weight:	2 g
分解能:	0,375 nm *
直線性:	0,15 µm *
Temperature stability sensitivity:	-5 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS08

Weight:	7 g
分解能:	0,6 nm *
直線性:	0,4 µm *
Temperature stability sensitivity:	-8 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS1

Weight:	8 g
分解能:	0,75 nm *
直線性:	1,5 µm *
Temperature stability sensitivity:	-32 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS1HP

Weight:	8 g
分解能:	0,75 nm *
直線性:	1,5 µm *
Temperature stability sensitivity:	-10 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE1

Weight:	3,5 g
分解能:	0,75 nm *
直線性:	2 µm *
Temperature stability sensitivity:	-10 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS2

Weight:	50 g
分解能:	1,5 nm *
直線性:	1 µm *
Temperature stability sensitivity:	-64 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CSE2

Weight:	20 g
分解能:	1,5 nm *
直線性:	2,6 µm *
Temperature stability sensitivity:	-64 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS3

Weight:	70 g
分解能:	2,25 nm *
直線性:	0,9 µm *
Temperature stability sensitivity:	-96 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS5

Weight:	95 g
分解能:	3,75 nm *
直線性:	2,5 µm *
Temperature stability sensitivity:	-160 nm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

CS10

Weight:	180 g
分解能:	7,5 nm *
直線性:	15 µm *
Temperature stability sensitivity:	-320 nm/ppm/°C
Operating temperature max.:	+200 °C

* depends on controller unit

円筒形状センサ（内蔵ケーブルタイプ）

Model	Measuring range	Min. ø Target	Dimension
CSH02-CAm1,4	0,2 mm	7 mm	Ø8 × 14 mm
CSH05-CAm1,4	0,5 mm	7 mm	Ø8 × 14 mm
CSH1-CAm1,4	1 mm	11 mm	Ø12 × 14 mm
CSH1,2-CAm1,4	1,2 mm	11 mm	Ø12 × 14 mm
CSH2-CAm1,4	2 mm	17 mm	Ø20 × 14 mm

CSH = capa Sensor Hybrid

Detail

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CSH02-CAm1,4

Weight:	30 g
分解能:	0,15 nm *
直線性:	0,054 µm *
Temperature stability sensitivity:	-2,4 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH05-CAm1,4

Weight:	30 g
分解能:	0,38 nm *
直線性:	0,13 µm *
Temperature stability sensitivity:	-6 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1-CAm1,4

Weight:	33 g
分解能:	0,75 nm *
直線性:	0,13 µm *
Temperature stability sensitivity:	-12 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1,2-CAm1,4

Weight:	33 g
分解能:	0,9 nm *
直線性:	0,84 µm *
Temperature stability sensitivity:	-14,4 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH2-CAm1,4

Weight:	38 g
分解能:	1,5 nm *
直線性:	0,5 µm *
Temperature stability sensitivity:	-24 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

フラット形状センサ（内蔵ケーブル付き）

Model	Measuring range	Min. ø Target	Dimension
CSH02FL-CRm1,4	0,2 mm	7 mm	10,5 × 8 × 4 mm
CSH05FL-CRm1,4	0,5 mm	7 mm	10,5 × 8 × 4 mm
CSH1FL-CRm1,4	1 mm	11 mm	17 × 12 × 4 mm
CSH1,2FL-CRm1,4	1,2 mm	11 mm	17 × 12 × 4 mm
CSH2FL-CRm1,4	2 mm	17 mm	20 × 20 × 5 mm

CSH = capa Sensor Hybrid
FL = Flat Design

Detail

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CSH02FL-CRm1,4

Weight:	28 g
分解能:	0,15 nm *
直線性:	0,05 µm *
Temperature stability sensitivity:	-2,4 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH05FL-CRm1,4

Weight:	28 g
分解能:	0,38 nm *
直線性:	0,09 µm *
Temperature stability sensitivity:	-6 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1FL-CRm1,4

Weight:	30 g
分解能:	0,75 nm *
直線性:	0,2 µm *
Temperature stability sensitivity:	-12 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH1,2FL-CRm1,4

Weight:	30 g
分解能:	0,9 nm *
直線性:	0,84 µm *
Temperature stability sensitivity:	-14,4 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

CSH2FL-CRm1,4

Weight:	36 g
分解能:	1,5 nm *
直線性:	0,32 µm *
Temperature stability sensitivity:	-24 nm/°C
Operating temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

静電容量式ギャップセンサ

Model	Measuring range	Min. ø Target	Dimension
CSG0,50-CAm2,0	0,9 - 1,9	7x8 mm	200x15x0,9
CSG1,0-CAm2,0	0,9 - 2,9 mm	8x9 mm	200x15x0,9

CSG = capa Sensor Gap

Detail

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CSG0,50-CAm2,0

Weight:	77 g
分解能:	4 nm *
直線性:	0,5 µm *

* depends on controller unit

CSG1,0-CAm2,0

Weight:	77 g
分解能:	8 nm *
直線性:	1 µm *

* depends on controller unit